12/30/2011	6:08:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/30/2011	6:08:22 PM	Recipe started at 6:08 PM
12/30/2011	6:08:22 PM	Helium valve closed
12/30/2011	6:08:22 PM	H2 valve closed
12/30/2011	6:08:22 PM	BCl3 valve closed
12/30/2011	6:08:22 PM	PH3 valve closed
12/30/2011	6:08:22 PM	SiCl4 pre valve closed
12/30/2011	6:08:22 PM	SiCl4 post valve closed
12/30/2011	6:08:22 PM	Main Vac valve closed
12/30/2011	6:08:22 PM	Bypass valve closed
12/30/2011	6:08:22 PM	Bubbler valve closed
12/30/2011	6:08:22 PM	Helium MFC set to  0.000000
12/30/2011	6:08:22 PM	H2 MFC set to  0.000000
12/30/2011	6:08:22 PM	BCl3 MFC set to  0.000000
12/30/2011	6:08:22 PM	PHl3 MFC set to  0.000000
12/30/2011	6:08:22 PM	SiCl4 MFC set to  0.000000
12/30/2011	6:08:22 PM	Bypass solenoid MFC set to  0.000000
12/30/2011	6:08:22 PM	Tube furnace set to 0
12/30/2011	6:08:25 PM	H2 valve closed
12/30/2011	6:08:25 PM	BCl3 valve closed
12/30/2011	6:08:25 PM	PH3 valve closed
12/30/2011	6:08:25 PM	SiCl4 pre valve closed
12/30/2011	6:08:25 PM	SiCl4 post valve closed
12/30/2011	6:08:25 PM	Main Vac valve closed
12/30/2011	6:08:25 PM	Bypass valve closed
12/30/2011	6:08:25 PM	Bubbler valve closed
12/30/2011	6:08:25 PM	Helium valve opened
12/30/2011	6:08:25 PM	Helium MFC set to  500.000000
12/30/2011	6:08:25 PM	H2 MFC set to  0.000000
12/30/2011	6:08:25 PM	BCl3 MFC set to  0.000000
12/30/2011	6:08:25 PM	PHl3 MFC set to  0.000000
12/30/2011	6:08:25 PM	SiCl4 MFC set to  0.000000
12/30/2011	6:08:25 PM	Bypass solenoid MFC set to  0.000000
12/30/2011	6:08:25 PM	Tube furnace set to 0
12/30/2011	6:09:29 PM	Helium valve closed
12/30/2011	6:09:29 PM	H2 valve closed
12/30/2011	6:09:29 PM	BCl3 valve closed
12/30/2011	6:09:29 PM	PH3 valve closed
12/30/2011	6:09:29 PM	SiCl4 pre valve closed
12/30/2011	6:09:29 PM	SiCl4 post valve closed
12/30/2011	6:09:29 PM	Main Vac valve closed
12/30/2011	6:09:29 PM	Bypass valve closed
12/30/2011	6:09:29 PM	Bubbler valve closed
12/30/2011	6:09:29 PM	Helium MFC set to  0.000000
12/30/2011	6:09:29 PM	H2 MFC set to  0.000000
12/30/2011	6:09:29 PM	BCl3 MFC set to  0.000000
12/30/2011	6:09:29 PM	PHl3 MFC set to  0.000000
12/30/2011	6:09:29 PM	SiCl4 MFC set to  0.000000
12/30/2011	6:09:29 PM	Bypass solenoid MFC set to  0.000000
12/30/2011	6:09:30 PM	Tube furnace set to 0
12/30/2011	6:09:31 PM	Run finished at 6:09 PM
12/30/2011	6:09:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/30/2011	6:35:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/30/2011	6:35:35 PM	Recipe started at 6:35 PM
12/30/2011	6:35:35 PM	Helium valve closed
12/30/2011	6:35:35 PM	H2 valve closed
12/30/2011	6:35:35 PM	BCl3 valve closed
12/30/2011	6:35:35 PM	PH3 valve closed
12/30/2011	6:35:35 PM	SiCl4 pre valve closed
12/30/2011	6:35:35 PM	SiCl4 post valve closed
12/30/2011	6:35:35 PM	Main Vac valve closed
12/30/2011	6:35:36 PM	Bubbler valve closed
12/30/2011	6:35:36 PM	Bypass valve opened
12/30/2011	6:35:36 PM	Helium MFC set to  0.000000
12/30/2011	6:35:36 PM	H2 MFC set to  0.000000
12/30/2011	6:35:36 PM	BCl3 MFC set to  0.000000
12/30/2011	6:35:36 PM	PHl3 MFC set to  0.000000
12/30/2011	6:35:36 PM	SiCl4 MFC set to  0.000000
12/30/2011	6:35:36 PM	Bypass solenoid MFC set to  0.000000
12/30/2011	6:35:36 PM	Tube furnace set to 0
12/30/2011	6:37:57 PM	Helium valve closed
12/30/2011	6:37:57 PM	H2 valve closed
12/30/2011	6:37:57 PM	BCl3 valve closed
12/30/2011	6:37:57 PM	PH3 valve closed
12/30/2011	6:37:57 PM	SiCl4 pre valve closed
12/30/2011	6:37:57 PM	SiCl4 post valve closed
12/30/2011	6:37:57 PM	Main Vac valve closed
12/30/2011	6:37:57 PM	Bubbler valve closed
12/30/2011	6:37:57 PM	Bypass valve opened
12/30/2011	6:37:57 PM	Helium MFC set to  0.000000
12/30/2011	6:37:57 PM	H2 MFC set to  0.000000
12/30/2011	6:37:57 PM	BCl3 MFC set to  0.000000
12/30/2011	6:37:57 PM	PHl3 MFC set to  0.000000
12/30/2011	6:37:57 PM	SiCl4 MFC set to  0.000000
12/30/2011	6:37:57 PM	Bypass solenoid MFC set to  0.000000
12/30/2011	6:37:57 PM	Tube furnace set to 0
12/30/2011	6:38:57 PM	Helium valve closed
12/30/2011	6:38:57 PM	H2 valve closed
12/30/2011	6:38:57 PM	BCl3 valve closed
12/30/2011	6:38:57 PM	PH3 valve closed
12/30/2011	6:38:57 PM	SiCl4 pre valve closed
12/30/2011	6:38:57 PM	SiCl4 post valve closed
12/30/2011	6:38:57 PM	Bypass valve closed
12/30/2011	6:38:57 PM	Bubbler valve closed
12/30/2011	6:38:57 PM	Main Vac valve opened
12/30/2011	6:38:57 PM	Helium MFC set to  0.000000
12/30/2011	6:38:57 PM	H2 MFC set to  0.000000
12/30/2011	6:38:57 PM	BCl3 MFC set to  0.000000
12/30/2011	6:38:57 PM	PHl3 MFC set to  0.000000
12/30/2011	6:38:57 PM	SiCl4 MFC set to  0.000000
12/30/2011	6:38:57 PM	Bypass solenoid MFC set to  0.000000
12/30/2011	6:38:57 PM	Tube furnace set to 0
12/30/2011	6:38:58 PM	Run finished at 6:38 PM
12/30/2011	6:38:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
